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Equipment Supplier Frequently Asked QuestionsTable of Contents
What is Automation Testing?Automation testing is a series of discrete static and dynamic functional inspections. Automation testing assures the prospective buyer of 300mm semiconductor process or metrology equipment that the tool has a minimum set of functioning automation capabilities and that the tool supplier has implemented the relevant SEMI® Standards for automation in an acceptable and specific manner. The testing of a tools automation software implementation is defined as an automation maturity assessment. Back to Top
Our customer requires automation testing using the International Sematech Operational Scenarios. Will FACTS testing satisfy this requirement?Yes. FACTS is licensed by International SEMATECH to use specific test processes, methodologies, and operational scenarios. Only testing by an accredited and independent third party test service provider, licensed by International SEMATECH, can meet this requirement. Back to Top
Is there a reason for an equipment manufacturer to invest in third party tool testing other than to satisfy a customer requirement?Yes. When implementing 300mm automation requirements, the issue facing the tool supplier is not whether they have incorporated the applicable SEMI® standards, but if the implementation of those standards is in synchronization with each customer’s unique vision for automation. By analogy, when an architect designs a new home for a customer, the plans are incomplete if he only notes: “Build in accordance with all applicable plumbing and electrical codes.” Instead, he must include specifications and details enabling the contractor to properly locate fixtures with the appropriate fittings and finish requested by the customer. With the advent of the SEMATECH Test Methodology and Operational Scenarios, the semiconductor equipment manufacturer has been given a yardstick that establishes a baseline for automation capabilities and maturity. These operational scenarios represent the concurrent view of the SEMATECH member companies regarding a minimum set of core automation functionalities. An equipment manufacturer who can demonstrate compliance can make the case that additional or different automation functionality is a commercial issue representing a non-recurring engineering (NRE) set of requirements, and not an issue of deficient automation functionality, capabilities, or SEMI® standards compliance. The equipment supplier who has demonstrated compliance, will have an advantage during customer fact-finding or negotiation meetings. Having the ability to provide independent third party automation testing results will leave no ambiguity concerning the quality of your offering. In fact, many IC makers are beginning to waive their automation source inspection requirements based on the strength of satisfactory ISMI based testing results. Therefore, rather than looking at third party automation testing as something that you have to do preemptively or because of a specific customer requirement, there is a clear case to be made for the value proposition of third party automation testing for the equipment manufacturer. Back to Top
Can automation testing help improve a tool’s automation software?Yes. The best time to find any software problem is before that software is deployed. Testing avoids warranty or maintenance problems. No matter how good or diligent your software engineering staff is, evaluation of your tool’s automation software by another set of critically trained eyes will reap benefits far in excess of the cost of testing. FACTS strongly recommends that an independent test evaluation and analysis be undertaken before the release of each major automation software revision to a production-ready status. Data compiled by International SEMATECH during their Software Conformance Testing Project in 2002 indicates that when automation issues found during third party testing were given critical analysis and prioritized for maximum gain and effect of improvement, an aggregate average growth rate in supplier automation implementation improvement of 7.2% per month was achieved. This program further concluded that:
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Will our customers accept the test report issued by FACTS?Yes. As a condition of our license for the use and implementation of the International Sematech intellectual property for 300mm tool testing, the FACTS work product is continually scrutinized. International Sematech audits our testing methodology, engineering analysis, and test reports to ensure the highest level of compliance with their standardized test methodology, deficiency analysis, and reporting. This process also assures that a test report of your tool from FACTS will meet the highest standards as well as be accepted as an appropriate assessment of your tool’s 300mm automation maturity by the member companies of International SEMATECH and a growing list of Semiconductor I C Manufacturers worldwide. Back to Top
Can we do our own automation testing?Yes. For the equipment manufacture who has invested significantly in their own program of automation self testing and evaluation FACTS offers a specific professional service, our BASIC Package. The BASIC package provides a test report from an independent third party test services provider that will satisfy a specific customer procurement requirement for TSP evaluation. The goal of the SEMATECH member companies is to be able to evaluate, with confidence, the results of objective third party testing which has been executed using a standardized process for the collection and reporting of automation maturity test data. To meet this objective, International SEMATECH is only licensing select independent third party test services providers such as FACTS, who have demonstrated that they can achieve this goal, to perform these automation maturity assessments. If you wish to become familiar with the ISMI Assessment Criteria and Processes for TSP's you will find it HERE, on the LINKS page of our WEB site. FACTS encourages equipment manufacturers with the necessary tools, software licenses, knowledge of SEMI® Standards, and expertise to perform their own tool testing. International SEMATECH provides the content of the 300mm Operational Scenarios used by FACTS as public domain information. You l can find them on HERE, on the LINKS page of our WEB Site. Back to Top
How do I know that a test report issued by FACTS is unbiased?FACTS test methodology, engineering analysis, and test reporting is audited by International SEMATECH as a condition of licensing. Unlike some third party test service providers, FACTS has no business interest in software or hardware development or in equipment integration for semiconductor equipment manufacturers. Semiconductor equipment testing is a highly specialized professional service and is the only type of service that FACTS offers to semiconductor equipment manufacturers. Should a semiconductor equipment manufacturer require engineering support or software development services to improve their tool’s automation capabilities, FACTS will provide a list of companies that can provide the services needed. FACTS has no financial interest in any of the companies we recommend. Back to Top
If our tool satisfactorily passes International SEMATECH Testing, does that mean that it is certified as 300mm compliant?No. Neither International SEMATECH, FACTS, nor any other third party, can certify that a tool’s automation capabilities will completely meet a specific customer’s automation requirements. In fact, some customers may require additional testing for automation requirements above the scope of what our ISMI sanctioned testing will cover. FACTS testing provides a series of standardized tests and operational scenarios that will identify a tool’s functional automation capabilities baseline. It is an assessment of the maturity and robustness of the automations software’s implementation against a set of known criteria. Back to Top
Is our tool expected to pass all of these tests with a perfect score?No. Not all tools will have the need to implement all the SEMI® Automation Standards that are covered by FACTS ISMI based Testing. Some 300mm tools score highly in all areas tested, but it is to be expected that some tools will be less compliant than others in some areas of advanced 300mm automation functionality. You and your customers must assess, on an individual basis, what functionality and capabilities are important or relevant to their specific tool. Back to Top
Who will have access to our tool test results?FACTS will never provide any information relative to the specific test article to any third party. We take our obligation to protect your confidential information very seriously. Please take time to review the FACTS corporate policy regarding the use and protection of our customers’ confidential Information. Only the organization contracting with FACTS for Test Services will receive any of the testing results, engineering analysis data, or the engineering reports that represents the findings related to the test object. You will be solely responsible for any distribution of test data and analysis results. Unless otherwise required by our customer, FACTS will retain copies of test setup data, log files, and other engineering information related to the specific test article’s automation testing. The retention of these reports enables us to perform subsequent testing for you at a reduced rate. FACTS is required as a condition of our license from International SEMATECH to demonstrate that any manufacturer’s automation test data or information we retain is adequately preserved and separated from other manufacturers’ data. FACTS is required to provide a secure environment that insures data integrity and limits access to our customers’ intellectual property. As an additional requirement of our license from International SEMATECH, FACTS is required to provide a quarterly report of certain non-confidential information. This information includes a nonspecific summary of results obtained from testing during the quarter, the number of times and customer base (by segment) that testing was performed during the quarter, and a description of any lessons learned or suggestions for improvement obtained as a result of this Service. These requirements help International SEMATECH refine the testing process and represent a commitment to ongoing quality improvement. This reporting will in no way identify a specific supplier’s individual tool or cumulative testing results. FACTS fully supports International SEMATECH in these goals and objectives. Back to Top
Does testing present any danger of damage to the tool?No. The tests are not destructive nor should they pose any danger to the tool’s integrity. FACTS personnel will never directly operate a customer’s tool. As a condition of our testing, your tool must be under the direct control and supervision of a knowledgeable employee/operator from your company at all times during the testing process. There is, however, always the possibility that your tool’s software will have a “bug” or a problem that will be uncovered for the first time under testing by FACTS. This may cause irregular, erratic, or other unexpected behavior of your tool. Our experience has been that these kinds of problems are most often manifested in a tool’s robotics or material movement functionality and will sometimes lead to test wafer breakage, mechanical jams, or other similar problems. Back to Top
How long does it take to run these tests? How much tool time must be allocated?Testing time varies based on the automation complexity and type of tool under test. Our experience has shown that a manufacturer can expect it to take up to ten nine-hour workdays to test a 300mm tool that has never undergone a rigorous testing process. Subsequent re-testing of the same tool, or the initial testing of a tool which has previously undergone a process of in-house testing, can usually be accomplished in five or six nine-hour work days. Equipment manufacturers with significant self-testing expertise sometimes assume that testing can be accomplished in 3 days or less. However, because of the rigid structure of the test plans and test process from ISMI, this usually will not be the case. Neither FACTS nor any TSP has control or input into the ISMI test plan or ISMI test execution process. Therefore, we advise those clients with mature and previously tested automation software platforms to plan on a minimum requirement of 5 days of tool time. If it presents a problem to provide the test article for testing during normal working hours, FACTS can provide test services during off hours (second or third shift) for an additional premium. Back to Top
What happens if a tool is unavailable for a scheduled test?Schedule a FACTS test only when the tool and support personnel will be available for the entire test period. FACTS normally requires a one-week notice of cancellation in the event that a test object becomes unavailable. If a tool is not available for testing when scheduled, STANDBY time can be arranged for an additional premium. Further information regarding Standby time and testing during non-standard hours is provided within the Terms and Conditions of our standard Testing Agreement. Back to Top
How long will it be before we will have an assessment of our tool? How long will it take before we receive the actual Test Report from FACTS?An initial maturity assessment from our test engineer will be available almost immediately after the completion of the tool’s testing. However, our process requires the investment of significant engineering time to analyze the test data. After the test is completed, the engineer will analyze the collected data. Another member of our senior engineering staff who assesses the test results then reviews the test object’s data. Only then, will the actual test report be generated by a senior FACTS engineer and delivered to the customer. The official report will normally be completed and delivered between fourteen to twenty-one days after the conclusion of the actual test, depending on our current backlog. Back to Top
What if there are questions about the Test Report?As a part of all of our standard Professional Services testing packages FACTS provides its customers with two telephone consultations with members of our engineering staff within thirty days of the delivery of the formal test report. These consultations will provide your engineering team with any necessary clarification or interpretive information regarding our test findings. Back to Top
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