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Automation Operational Specification Table of Contents Example
Table of Contents Executive Summary 2 Purpose........................................................................................ 2 Introduction................................................................................... 2 General Supplier Requirements................................................. 4 General Hardware Requirements.............................................. 4 General Software Requirements................................................ 5 General Move-In / Move-Out Scenarios.................................... 5 Appendices.................................................................................. 6 Limitations.................................................................................... 6 Disclosure & Confidentiality........................................................ 6 Point-of-Contact Information....................................................... 7
Document Revision
History........................................................ 7 General Supplier Requirements 8 Evaluation of Supplier’s Response............................................ 8 Equipment Evaluation Score.................................................... 10 Supplier Fact Finding Meetings............................................... 11 Supplier Project Management................................................. 11 Acceptance Test Procedure Management............................. 13 Supplier Site Source Inspection.............................................. 13 Factory Acceptance Testing.................................................... 14 Automation Software Quality.................................................... 15 Software Configuration Control................................................ 15 Software Release Process...................................................... 16 General Support........................................................................ 16 Required Automation Documents........................................... 18
Field Change
Notices............................................................... 20 General Hardware Requirements 22 Relevant Standards & Guidelines............................................ 22 Equipment User Interface......................................................... 24 Computer Hardware.................................................................. 25 Load Ports.................................................................................. 25 Additional Loadport Requirements......................................... 26 Carrier Read.............................................................................. 27 Wafer Identification.................................................................... 28 Micro-contamination Environment Requirements.................. 29 Electronic Communication I/O Ports....................................... 31 General and OHT Safety System............................................. 34 Light Tower ................................................................................. 36 Equipment Reliability, Availability, and
Maintainability
Measurement................................................... 38 General Software Requirements 39 Relevant Standards & Guidelines............................................ 39 General User Interface Requirements..................................... 40 User Interface Requirements for E84...................................... 45 Generic Equipment Model........................................................ 46 State Models.............................................................................. 47 Communications State Model................................................... 47 Communications State Model Parameters............................ 47 On-Line Identification................................................................ 48 Alarm Management................................................................... 48 Alarm Reporting......................................................................... 49 Remote Commands.................................................................. 50 Event Reporting and Trace Data Collection........................... 50 Error Messages......................................................................... 50 Clock........................................................................................... 50 SEMI E30 GEM related data items......................................... 51 HSMS - SEMI E37.................................................................... 53 Consumption Management...................................................... 53 Carrier Management [SEMI E87]............................................ 54 Carrier State Model................................................................... 56 Load Port/Carrier Association................................................. 56 Wafer Identification.................................................................... 59 Definition of Wafer ID Equipment Constants.......................... 60 Wafer Tracking – SEMI E90 Requirements........................... 60 Control Job Management......................................................... 62 Process Job Management....................................................... 63 Computer Software................................................................... 64
Third Party
Software.................................................................. 65 General Material Move-In / Move-Out Requirements 66 Relevant Standards................................................................... 66 Common Module Description.................................................. 66
Exception
Handling................................................................... 88
Glossary
Index 90
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